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Integrated circuit with HV input stage - has switching MOSFET on substrate with insulated gate electrode having gate oxide layer of equal thickness to field oxide layer

机译:具有HV输入级的集成电路-在具有绝缘栅电极的衬底上具有开关MOSFET,绝缘栅电极的栅氧化层的厚度与场氧化层的厚度相同

摘要

The gate electrode (38) of the switching MOSFET (14) is insulated against the substrate (10) by a thin gate oxide film (36). Under the gate electrode the substrate has implanted ions for adjusting the transistor threshold voltage. The electric leads for the gate, drain, and source electrodes are insulated against the substrate by a field oxide layer (40) of greater thickness. The thickness of the gate oxide film (42) of the MOS input transistor is the same as that of the field oxide layer. The MOS input transistor is formed without ion implantation underneath its thick gate oxide layer. USE/ADVANTAGE - For HV breakdown-resistant input stage, without need for change of the process parameters and mfg. course.
机译:开关MOSFET(14)的栅电极(38)通过薄的栅氧化膜(36)与衬底(10)绝缘。在栅电极下方,衬底已注入离子以调节晶体管阈值电压。栅极,漏极和源极的电引线通过更大厚度的场氧化层(40)与基板绝缘。 MOS输入晶体管的栅极氧化膜(42)的厚度与场氧化层的厚度相同。 MOS输入晶体管在其厚的栅极氧化物层下方形成而没有离子注入。使用/优点-用于耐高压击穿的输入级,无需更改过程参数和制造力。课程。

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