Hard coating multilayer develops by deposition of titanium nitride, carbonitride of titanium and carbon i -

摘要

Hard multilayer coating produced by ion deposition. According to the invention the hard coating comprises firstly a layer of titanium nitride, then a layer of titanium carbonitride, then a layer of i-carbon. According to the invention the deposition of the various layers is performed in an ion deposition device under low pressure comprising a substrate-carrier cathode 8, a device for evaporating titanium 3 using an electron gun 5, gas delivery piping 10, 11, a gas ionisation filament 14 and a positively polarised third electrode 9. The deposition of titanium nitride is obtained by discharge in nitrogen and simultaneous evaporation of titanium. The progressive replacement of nitrogen by a hydrocarbon makes it possible to obtain the carbonitride deposit. The finish layer of i-carbon is deposited after the removal of the nitrogen and of the evaporation of titanium.