A device for measuring a feature of an object in optics integrated, by interferometry.

摘要

Device for measuring a characteristic of an object by interferometry. Said device is comprised of a light source (12) emitting an input beam, means (20) with microguides for dividing the input beam into incident measuring and reference beams, a first microguide (14) for conveying the incident measuring beam to the object, a second microguide (16) for conveying the reference beam, a third microguide (18) for conveying the measurement beam issued from the object, microguide means (24) for interfering the reference and measure beams issued from the object and forming at least one interference signal, at least two sensors (D1, D2) for detecting said signal and delivering two out-of-phase electric signals representative of the interference signal, the separation and interference means and the microguides being formed on a guide structure integrated to a substrate, the interference means being Young holes (24) or a coupler with at least three paths.