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Apparatus and method for method for spatially- and spectrally- resolved measurements
Apparatus and method for method for spatially- and spectrally- resolved measurements
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机译:用于空间和光谱分辨测量的方法的装置和方法
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摘要
A scanning optical microscope or mapping system for spectrally- resolved measurement of light reflected, emitted or scatttered from a specimen is disclosed, in which the spectrally-resolving element is integrated into the detection arm of the microscope or mapping system to result in good photon collection efficiency as well as good spectral and spatial resolution. A confocal version of the microscope is disclosed which will be of particular interest in fluorescence microscopy, and the non-confocal mapping system will be of particular interest in photoluminescence mapping of semiconductor wafers.
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