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Laser evaporation method for forming high Tc superconducting films
Laser evaporation method for forming high Tc superconducting films
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机译:形成高Tc超导薄膜的激光蒸发方法
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摘要
Improvement in a method for preparing a superconducting thin film of compound oxide on a substrate (6) by laser evaporation technique. A rear surface of a target (7) used is cooled forcedly by a cooling system (9) during film formation.
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