Temperature control manner and the temperature control equipment null in the thermal treatment equipment of the semiconductor

摘要

PURPOSE:To control the temperature quickly with a high precision by obtaining preliminarily correspondence relations between the supply power to a radiation heating means and the temperature of a body to be heated. CONSTITUTION:A target temperature change curve is set preliminarily in a target temperature setter 10. A target temperature signal T0 from the target temperature setter 10 is inputted to a subtractor 31 together with an actually measured temperature signal Tr from a temperature detector 5 provided on the surface of a water 1 in a heating furnace 3 and becomes a deviation signal DELTAT for feedback control. This deviation signal DELTAT is inputted to multipliers 32-34. Multiplication of Kd in the multiplier 34 corresponds to multiplication of a gain in the preceding stage where a differential control output is obtained, and the multiplication output is given to the side of a feed-forward control system FF1. The target temperature signal T0 from the target temperature setter 10 is given to two multipliers 37 and 38 in the feed-forward control system FF.