Sample heating system and normal pressure CVD device and decompression CVD device

摘要

PURPOSE:To unify distribution of the surface temperature of a sample by a method wherein window holes of the plural number of pieces are provided to a sample base to load a sample to be heated, the tips of optical fibers are inserted therein respectively, and infrared light sources enabled to control arbitrary the supply quantity are provided at the rear ends thereof. CONSTITUTION:A sample base 11 is provided with a loading base 13 to load a sample 12 to be heated and consisting of a transparent quartz plate. Window holes 14 of the plural number of pieces are provided thereto, and the tips of optical fibers 15 are inserted respectively into the window holes 14 thereof. Infrared light sources 16 are provided at the rear ends of the optical fibers 15. When infrared lights supplied through the optical fibers 15 from the light sources 16 of the plural number of pieces are controlled, heating of the sample 12 can be controlled partially or wholly. When an exhaust vent 19 to be connected to a vacuum pump 20 is provided to a closed vessel 17, a vacuum CVD device is constructed.