METHOD FOR FORMING SOLID LUBRICATING FILM ON LONG-SIZED MATERIAL AND DEVICE THEREFOR

摘要

PURPOSE: To shorten the evacuating time, to form a uniform film on the entire long-sized material in its axial direction and to cope with the increase in the length of the material by the simple modification of a device. ;CONSTITUTION: This device is used to form a solid lubricating film on a long- sized material W by physical vapor deposition. The device consists of a main vacuum vessel 1 for housing a part of the material W, a vaporization source and/or a target 6 and slender vacuum vessels 2 and 3 connected to the vessel 1. A work moving device 4 for reciprocating the material W in the axial direction and a work rotating device 5 for rotating the material W are provided. The devices 4 and 5 are used to reciprocate the material in the axial direction and to rotate the material from the outside through a transfer rod 24 having a magnet coupler 24c while keeping vacuum.;COPYRIGHT: (C)1994,JPO&Japio