SYNTHESIS OF BORON CARBONITRIDE

摘要

PURPOSE: To provide a process capable of easily synthesizing boron carbonitride. ;CONSTITUTION: Boron carbonitride is synthesized by the thermal decomposition of an organic compound containing nitrogen and boron at the same time. Examples of the organic compound are organic borane, its derivative, organic borane nitride and its derivative. For example, boron carbonitride is formed on a substrate by heating a substrate 5 placed in a furnace having controllable atmosphere and introducing a raw material gas 7 composed of the organic compound into the furnace using a carrier gas such as nitrogen. Since this process is devoid of a raw material mixing step in contrast to conventional process, uniform boron carbonitride can be synthesized with an extremely simple operation.;COPYRIGHT: (C)1994,JPO&Japio