Electronic energy loss microstructure measuring method and device

摘要

PURPOSE:To obtain information on a three-dimensional structure around an inelastically scattered atom by detecting an electron energy loss fine structure(EELFS) relating to the atom existing in a specified direction in regard to the inelastically scattered atom. CONSTITUTION:An electron beam is applied to the surface of a sample 503 and the energy of a scattered electron is analyzed by controlling an energy analyzer 504 by a computer. As the result, an electron energy loss spectrum is read in the computer. The part of EELFS being present on this spectrum is subjected to Fourier transform by the computer and a radial distribution function is determined. With the angle of rotation of the analyzer 504 controlled by the computer so that a detection angle theta be 0, subsequently, the dynamic distribution function is determined in the same way as in the preceding time. Then, the EELFS measurement is executed with the sample 503 rotated by a rotating mechanism, in addition to the measurement with the detection angle thetavaried. Thereby the radial distribution function in an arbitrary direction can be determined in regard to a scattered atom on the sample 503.