PERFORMANCE EVALUATION OF CLOSED-LOOP PURIFICATION SYSTEM

摘要

PURPOSE: To use a comparatively cheap simple device, and to decide the purification capability of a gas purifier with high accuracy by monitoring the inlet impurity concentration of the gas purifier and discriminating the time change of the impurity concentration. ;CONSTITUTION: A gas utilization equipment 2 is connected to a gas purifier 4 in a closed loop, and a monitor 6 for monitoring an impurity gas is connected to the inlet of the gas purifier. Impurity concentration measured by the monitor 6 is stored in a storage device 8. When the gas utilization equipment 2 is operated, a fixed quantity of impurities are generated, and the inlet impurity concentration C_in, of the gas purifier 4 displays a fixed value first. When the gas utilization equipment 2 continues to be operated, the purification capacity of the gas purifier 4 gradually lowers, the inlet impurity concentration of the gas purifier 4 begins to increase, and increase section itself can be detected. The inlet impurity concentration of the gas purifier 4 is monitored by the monitor 6, and compared with inlet impurity concentration up to that time, and the rise of the inlet impurity concentration of the gas purifier 4 is detected, thus regenerating the gas purifier.;COPYRIGHT: (C)1993,JPO&Japio