THIN FILM TRANSISTOR HAVING A TRIPLE LAYER DIELECTRIC GATE INSULATOR, METHOD OF FABRICATING SUCH A THIN FILM TRANSISTOR AND AN ACTIVE MATRIX DISPLAY HAVING A PLURALITY OF SUCH THIN FILM TRANSISTORS

摘要

In an active matrix display having a plurality of thin film transistors for selectively enabling and disabling pixels of the display, the improvement comprising a gate insulator for each of said thin film transistors having triple layer dielectric.