Method for preventing side diffusion of source / drain region using RTP

摘要

The present invention relates to a method for preventing lateral diffusion of source / drain regions using RTP, and is to reduce the heat treatment process time in seconds and increase the temperature to suppress impurity diffusion.;That is, according to the present invention, a thermal process is performed at a process time of 25 to 30 seconds and a process temperature of 1000 to 1300C in the BPSG flow and the fly-annealing process after the source / drain is formed, And more particularly to a method for preventing lateral diffusion of a source / drain region using an RTP which can obtain a sufficient BPSG flow and a plug annealing state because the process proceeds at a much higher temperature than a conventional thermal process.