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Electronically tuned matching networks and resonant tank circuits using adjustable inductance elements
Electronically tuned matching networks and resonant tank circuits using adjustable inductance elements
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机译:使用可调电感元件进行电子调谐的匹配网络和谐振回路电路
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摘要
The present invention relates to an impedance matching circuit based on a parallel resonance LC tank circuit and a low loss design for an adjustable inductance element suitable for use in this parallel tank circuit. Applying an impedance matching circuit to a plasma process is also described; Wherein the local impedance transform circuit is used to improve power transfer to the plasma source antenna.
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