Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits

摘要

Impedance matching circuits based on parallel-resonant L-C tank circuits, and a low-loss design for an adjustable inductance element suitable for use in these parallel tank circuits are described. The application of an impedance matching circuit to a plasma process is also disclosed; in this context, a local impedance transformation circuit is used to improve power transfer to the plasma source antenna.