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Control of Solid-Liquid Interface during Growth of GaAs Single Crystal by Horizontal Bridging Mill Method

机译:水平桥磨法控制GaAs单晶生长过程中的固液界面

摘要

The present invention relates to a control method of a solid-liquid interface during the growth of gallium arsenide (GaAs) single crystal by the Horizontal Bridge-Only (HB) method, and more particularly to a method of controlling a solid-So that a single crystal of dignity can be obtained. In order to maintain the smoothness of the solid-liquid interface, a refractory insulator 5 made of alumina magnesia is installed between the SiC liner tube 1 and the quartz reaction tube 2 by the length of gallium arsenide (GaAs) So that the temperature distribution in the cross section can be made uniform. Thus, the solid-liquid interface can be kept smooth and a single crystal of good quality can be obtained.
机译:本发明涉及一种通过水平纯桥(HB)法控制砷化镓(GaAs)单晶生长过程中固液界面的控制方法,更具体地,涉及一种控制固相界面的方法。可以获得尊严的单晶。为了维持固液界面的平滑性,在SiC衬里管1与石英反应管2之间以砷化镓(GaAs)的长度设置由氧化铝镁制成的耐火绝缘体5,从而使温度分布在可以使横截面均匀。因此,固液界面可以保持光滑,并且可以获得高质量的单晶。

著录项

  • 公开/公告号KR940018492A

    专利类型

  • 公开/公告日1994-08-18

    原文格式PDF

  • 申请/专利权人 박원근;

    申请/专利号KR19930001240

  • 发明设计人 오명환;송준석;이호성;

    申请日1993-01-30

  • 分类号C30B15/20;

  • 国家 KR

  • 入库时间 2022-08-22 04:37:34

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