Mirror for excimer - laser and excimer - a laser device with the use of the mirror.

摘要

A reflector for an excimer laser is composed of an aluminum layer (12) deposited on a substrate (11) and at least two pairs of dielectric multilayers (13) of high refractive index material and low refractive index material alternately piled on the aluminum layer, and optical thickness of the respective layers of an outer pair of the dielectric multilayers are deviated from lambda /4 and total optical thickness of the outer pair is made to be lambda /2.