An apparatus for generating planar low pressure plasmas energized with the use of a coil with its axis parallel to the surface of a coupling window

摘要

an embodiment of the present invention consists of a plasmasystem, a hauptspule with a flat side and a parallelkondensator contains the concerted circle form, with an rf frequency anpassungsstufe by a generator energy eingekop pelt.a verarbeitungskammer with a quartz glass, a gas with low pressure relief, the flat side of the hauptspule adjacent to and a two-dimensional plasma in the form of a circular disc with a high rate of fluid flow through the hauptspule gezu00fcn det and maintained.in the chamber the window opposite electrode is for attaching a halbleiterwafers for processing used to the electrode and a greater potential controls the ion power and keep the plasma out of accelerated ions.