Semiconductor test system for checking integrated circuit - synchronises test device and optical-beam-induced-current measurement device and evaluates IC and OBIC output signals

摘要

A test system contains an Optical Beam Induced Current or OBIC measurement device (8) which successively illuminates at least one active transistor region in the IC (1) with a light beam (7) so as to detect the electrical current induced by the beam. A test device (5) passes a test signal to the IC and simultaneously receives an output signal from its external connections (2a-2c) and an output signal from the OBIC device. Both signals are compared with anticipated values. A synchronisation device synchronises the test and OBIC devices. ADVANTAGE - Allows testing of very large area and highly integrated circuits.