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Optically activated wafer-scale pulser with AlGaAs epitaxial layer
Optically activated wafer-scale pulser with AlGaAs epitaxial layer
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机译:具有AlGaAs外延层的光激活晶圆级脉冲发生器
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摘要
A device for generating pulses of radio frequency energy in response to pulses of laser light in which a circular wafer of GaAs has metallized annular layers ohmically bonded to the wafer by epitaxial GaAs layers, and an epitaxial layer of AlGaAs in the center of one of the annular epitaxial layers through which laser light is to be directed, there being a plurality of apertures in the metallized layer in contact with the AlGaAs epitaxial layer. In addition, an AlGaAs epitaxial layer may be formed opposite the first AlGaAs layer and an optical fiber is brought into contact with it so that laser light can be introduced at both sides of the wafer.
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