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System of doors between two mobile containers, particularly two ultraclean containers
System of doors between two mobile containers, particularly two ultraclean containers
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机译:两个移动式集装箱之间的门系统,尤其是两个超净集装箱
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摘要
The invention permits the transfer between two containers of an object without the latter being in contact with the atmosphere around the containers. The system comprises two doors (12, 22) joined tightly to one another in such a way that the outer faces (13, 23) of these doors are positioned facing one another during opening, e.g. by winding the same around a drum (21). These doors are constituted by two flexible curtains sliding in lateral carriages. The system is particularly applicable to the production of semiconductor wafers or slices in an ultraclean atmosphere.
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