BLOW-OFF DOOR FOR ULTRACLEAN ENCLOSING CONTAINER

摘要

PURPOSE: To allow the passage of an object from inside a first container to a second container by allowing a blowing door to prevent the atmosphere in the two containers from being polluted. CONSTITUTION: A blowing door 2 comprises an inlet 17 for a pressurized fluid and inner fluid chamber 15. At least one surface of the inner fluid chamber is ventilated by means of a filter provided between a surface 11 and the inner fluid chamber 15. Thus, the surface 11 contacting the outside air is ventilated while the door 2 is opened, and no polluting particles is brought into containers 4 and 5 during closure of the door 2. This is applicable to the treatment of silicon wafers or chips used in microelectronics.