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Surface profiling using scanning force microscopy
Surface profiling using scanning force microscopy
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机译:使用扫描力显微镜进行表面轮廓分析
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摘要
A method and apparatus for profiling surfaces, such as sidewalls of a trench or line, using a scanning force microscope provides improved measurement accuracy by controlling the position of the tip responsive to the real-time measured local slope of the surface.
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