Scanning force or atomic force microscopy probe has a number of sampling or interaction elements mounted at the distal end of its sprung region so that multiple, surface characterizing, information sources are provided

摘要

Probe (10) for scanning force microscopy has a mounting region, a sprung element region (30) fixed to the end of the mounting region, and a sampling or interaction area (40) formed at the distal end (32) of the sprung region. The sampling or interaction area has a multiplicity of sampling or interaction elements (51, 52) that are configured to interact with or sample a microscopy sample. The invention also relates to a corresponding scanning force microscope, a profile meter and a scanning force microscopy method.