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Dynamic compensation of non-linear electron beam landing angle in variable axis lenses
Dynamic compensation of non-linear electron beam landing angle in variable axis lenses
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机译:可变轴透镜中非线性电子束着陆角的动态补偿
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摘要
A dynamic correction arrangement for an electron beam projection/deflection system provides high order correction values for deflection in accordance with a correction equation. Particularly as applied to high accuracy telecentric deflection, the coefficients of terms of the correction equation may be determined by calibration for a small number of test points. Correction values may be stored in a look-up table or computed in real time by using a math co-processor in a processing pipeline. The correction provided corrects landing angle errors through the third order in telecentric projection/deflection systems such as systems utilizing variable axis immersion lenses.
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