Generating beams using electron cyclotron resonance source - producing electron beam concentric to ion beam axis for spatial charge compensation

摘要

The method involves generating and extracting the ions from a magnetically enclosed plasma in an ion source. The plasma is generated and heated by microwaves using electron cyclotron resonance. A plasma chamber (5) is provided in which the vacuum needed for plasma generation is generated and into which the microwaves are coupled. Ions are extracted from the plasma by a plasma electrode (10) and an extraction electrode (13). The potential difference between these electrodes (19,13) forms an attraction field. The plasma chamber (5) has one or more material evaporating apertures (8) to produce plasma and hence ions of any desired elements. The ion beam (11) coming from the chamber (5) and through the electrodes (10,13) is an electrically and mechanically bundled beam (12) and forms an electronic extraction channel with spatial charge compensation for the ions. ADVANTAGE - Combines principles of ECR and electron beam sources.