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Method of making n-channel and p-channel junction field-effect transistors and CMOS transistors using a CMOS or bipolar/CMOS process
Method of making n-channel and p-channel junction field-effect transistors and CMOS transistors using a CMOS or bipolar/CMOS process
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机译:使用CMOS或双极/ CMOS工艺制造n沟道和p沟道结型场效应晶体管和CMOS晶体管的方法
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摘要
A method of making N-channel and P-channel junction field- effect transistors using a modified CMOS process that simultaneously makes complementary metal-oxide-semiconductor transistors, or a modified BiCMOS process that simultaneously makes bipolar transistors and complementary metal-oxide-semiconductor transistors. Making junction field effect transistors using the basic CMOS process requires mask changes and an additional mask, etch, and implant step. Making junction field effect transistors using the BiCMOS process only requires mask changes.
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