CROSS-SECTION OBSERVATION SAMPLE AND OBSERVATION METHOD USING THE SAME

摘要

PURPOSE: To make appropriate the state of a device cross-section which is to be observed by a transmission electron microscope and obtain such cross-section state easily. ;CONSTITUTION: A first trench 16 which has a width at least the same as the width of a thin plate shape observation cross-sectional part 12 is formed on both sides of the observation cross-sectional part 12 by cutting off a sample 10 between its facing walls so as to leave the thin plate shape observation cross-sectional part 12 and reinforcing leg parts 14. Further, second trenches 18 which are linked with the first trench 16 are formed around the reinforcing leg parts 14. With this constitution, as the influence of a load from the facing walls of the sample 10 is not applied to the observation cross-sectional part 12, the flatness between the reinforcing leg parts 14 can be maintained, so that a resolution at the time of observation with a transmitting medium can be improved.;COPYRIGHT: (C)1995,JPO