METHOD FOR PREPARING SAMPLE FOR ELECTRON MICROSCOPIC OBSERVATION, THE SAMPLE FOR ELECTRON MICROSCOPIC OBSERVATION, AND METHOD FOR OBSERVING CROSS-SECTION OF SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide a method for preparing a sample for electron microscopic observation which prevents the occurrence of strain and irregularity on the surface of a sample due to cross-sectional processing and allows for efficient cross-sectional processing in a short time, the sample for electron microscopic observation, and a method for observing the cross-section of a sample.;SOLUTION: An observation target sample 11 is placed and fixed on a thin plate 12 which is harder than the sample 11, and irradiated with argon ions 15 in the direction perpendicular to the observation cross section of the sample 11 from the side of the thin plate 12 for cross-sectional processing to prepare a sample 16 for electron microscopic observation of the cross section.;COPYRIGHT: (C)2013,JPO&INPIT