PURPOSE: To produce a W-Ti alloy target having a reduced oxygen content. ;CONSTITUTION: A powdery mixture of W powder with TiH, powder is pressed after or under dehydrogenation to produce the objective W-Ti alloy target having a reduced oxygen content of 350 to 600ppm. When this target is used, trouble due to oxygen at the time of sputtering is relieved or eliminated and a high quality coating film such as an insulating barrier can be formed with high reliability.;COPYRIGHT: (C)1995,JPO
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