Vapor phase growth modulo null of electro- luminescence luminous

摘要

PURPOSE:To make the heating of the source material unnecessary and the control of transport amount easier by leading at least one of an element or its compound of the II group and the VI group and a luminous main element or its compound to a reaction pipe in the form of an organic compound vapor. CONSTITUTION:The H2 gas released from a cylinder 13 is flow-controlled by a mass flow controller MFC 12c, and n(CH3)2 is transported through a bubbler 8 together with the H2 gas. The HCl gas from a cylinder 14 is flow-controlled by an MFC 12b, and they are mixed and fed to a leading-in tube 2. A specific amount of H2, and H2S gas from a cylinder 15 are fed to a branch pipe 1a through an MFC 12a. The H2 gas from the cylinder 13 is delivered into a bubbler 10 and the TMC is transported. A specific amount of HCl gas from the cylinder 14 is mixed to it and fed to a leading-in pipe 3. These gases led in are reacted in a reaction pipe 1 and the ZnS:Mn luminous membrane is piled up on a base 5.