Inspection correction method and inspection correction device null of matrix type picture

摘要

PURPOSE:To improve the operation efficiency inspecting short circuits between plural electric conduction paths at a time, detecting a short-circuit part in detail as to a short-circuit detection position and correcting a defective part by a laser. CONSTITUTION:An inspection film 6 which has a terminal group 5 is brought into electric contact with terminal groups 3 and 4 of scanning lines and signal lines. An Sw (switch) 13 is closed to apply an inspection voltage from a voltage generator 10, and an Sw 23 is closed and analog Sws 21 are all turned on. Then leak currents of respective blocks of the terminal groups 3 and 4 are measured 20 and blocks where there are leaks are fixed. Then while the Sws 13 and 23 are still open, a clock signal phi1 is applied to a shift register 9 to make a scan in a block while the inspection voltage is generated 10. During the period, a clock signal phi2 is applied to the shift register 15 and analog Sws 16 are scanned in a conduction state for a specific time. When a current ammeter 20 detects a current larger than specified, the short circuit positions are detected from a counted value from the start of the accurate identification of the signals phi1 and phi2, and a defective part is fused and corrected by a laser.