METHOD FOR DISCRIMINATING FALSE INSPECTION OF DEFECT INSPECTING DEVICE

摘要

PURPOSE: To prevent the false inspection of a defect inspecting caused by foreign matters adhering to a detecting system, work holder, etc., by terminating an inspection in the course of the inspection when a defect is continuously found on the same coordinates by an arbitrary number of time. ;CONSTITUTION: The picture data detected by means of a picture detecting section 10 are stored in an image memory 11. A picture processing section 12 detects the defect of an object to be inspected by processing the image data and outputs defective coordinates. Coordinate memories 13 and 15 temporarily store the defective coordinates. A coordinate comparing section 15 discriminates the presence of the same coordinates by comparing the defective coordinates found as a result of the preceding inspection with the defective coordinates found as a result of the present inspection. A counter 16 counts up when the same coordinates exist and is cleared to zero when the same coordinates do not exist. A control section 17 controls a work carrying section 18 and the image processing section 12 and sets and cancels the count value of the counter 16. A defective coordinate outputting section 19 terminates an inspection during the course of the inspection when a defect is continuously exists on the same coordinates by an arbitrary number of times. Therefore, false inspection caused by foreign matters, contaminants, etc., can be prevented.;COPYRIGHT: (C)1995,JPO