IMAGING DEVICE FOR DEFECT INSPECTION, DEFECT INSPECTING SYSTEM, FILM MANUFACTURING DEVICE, IMAGING METHOD FOR DEFECT INSPECTION, DEFECT INSPECTING METHOD, AND FILM MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an imaging device for defect inspection capable of improving a capacity to detect defects of different modes.;SOLUTION: An imaging device 12 for defect inspection comprises: a light source 17 for transmitted light arranged on a principal surface 110a side of a polarizing film 110; a light source 18 for reflected light arranged on a principal surface 110b side of the polarizing film 110; an area sensor 16 arranged on the principal surface 110b side and imaging a two-dimensional imaging region R; and transporting means 11 for transporting the polarizing film 110 in a transporting direction Y. The area sensor 16 comprises a transmitted light receiving region 19a and a reflected light receiving region 19b. The light source 17 for transmitted light is arranged so that the transmitted light L1 transmitted through the polarizing film 110 is made incident on the transmitted light receiving region 19a. The light source 18 for reflected light is arranged so that the reflected light L2 reflected in the polarizing film 110 is made incident on the reflected light receiving region 19b.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2018,JPO&INPIT