PREPAING STRUCTURE OF NANOMETER SIZE ON SURFACE BY USING ELECTRON BEAM INDUCT CHEMISTRY BY ELECTRONICALLY EXCITED DISCONNECTION

摘要

PURPOSE: To provide a method of controlling the absorption of other atoms/ molecules by forming a nanometer-size structure on the surface by the electron beam-excited desorption effect. CONSTITUTION: A target surface is passivated by passivating species, an electron beam passes through a specified passivated surface part to eliminate the passivating species at a specified part, thereby forming a reactive region from which the species are desorbed, and specified species are reacted with the surface at the reactive region.