SOFT MAGNETIC ALLOY FILM, MAGNETIC HEAD, AND METHOD FOR ADJUSTING COEFFICIENT OF THERMAL EXPANSION OF SOFT MAGNETIC ALLOY FILM

摘要

PURPOSE: To reduce the difference in coefficient of thermal expansion between a soft magnetic alloy film and substrate so as to prevent the deterioration of the soft magnetic property of the alloy film by forming the solid solution of Ru in microcrystals composed mainly of Fe. ;CONSTITUTION: A soft magnetic alloy film is composed of microcrystals which is composed mainly of Fe and has a body-centered cubic structure and mean grain size of 40nm, the carbides or nitrides of one element or two or more elements selected from among Ti, Zr. Hf, V, Nb, Ta, Mo, and W deposited on the grain boundaries of the microcrystals, and the solid solution of either Si or A or Si and A and Ru formed in the microcrystals. Therefore, the influence of thermal stresses caused by heat treatment or gas welding on the alloy film can be reduced, because the difference in coefficient of thermal expansion between the alloy film and a substrate can be reduced by adjusting the coefficient of thermal expansion by changing the amount of Ru contained in the film. When this alloy film is used for a magnetic head, in addition, the soft magnetic property of the head can be improved.;COPYRIGHT: (C)1995,JPO