Manufacturing method of soft magnetic alloy film, magnetic head and soft magnetic alloy film

摘要

An object of the present invention is a soft magnetic alloy film having excellent soft magnetic properties and a low thermal expansion coefficient, a method of adjusting the thermal expansion coefficient of a magnetic head and a soft magnetic alloy film using the soft magnetic alloy film, and a soft magnetic alloy film and a soft magnetic alloy film. The present invention provides a method of introducing perpendicular magnetic anisotropy and forming a stripe-shaped domain.;Average crystal incidence, with crystals containing Fe or Co as a main component and carbides or nitrides of at least one element selected from the group of metal elements Ti, Zr, Hf, V, Nb, Ta, Mo, W If the diameter is 40 nm or less, and the average crystal grain diameter of the carbide or nitride crystal is d and the average crystal grain diameter of the crystal containing Fe or Co as a main component is D, the ratio (d / D ) Is provided with a soft magnetic alloy, characterized in that is greater than or equal to 0.05 and less than or equal to 0.4, and a magnetic head formed by using such a soft magnetic alloy film for part or all of the magnetic core is provided. In addition, as a method of adjusting the thermal expansion coefficient of the soft magnetic alloy film, by heat-treating the formed amorphous phase, fine crystals of Fe in an unbalanced state are precipitated, and at this time, more Ru is dissolved than the amount of Ru that can be dissolved in the microcrystals of Fe in equilibrium. To provide a method of adjusting the coefficient of thermal expansion.