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TI OR TI ALLOY MATERIAL PLATED BY VAPOR DEPOSITION WITH EXCELLENT ADHESION
TI OR TI ALLOY MATERIAL PLATED BY VAPOR DEPOSITION WITH EXCELLENT ADHESION
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机译:TI或TI合金材料通过气相沉积和出色的附着力沉积
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摘要
PURPOSE: To produce a Ti alloy material plated by vapor deposition with excellent adhesion by forming a vapor-deposited layer of metal Ti having a specified thickness on a Ti alloy material with a Ti oxide layer formed on the surface and forming a ceramic layer on the vapor-deposited layer. ;CONSTITUTION: A vapor-deposited layer of metal Ti contg. no oxide is formed as an underlayer in 0.01-10μm thickness on the surface of a Ti or Ti alloy material with a Ti oxide layer formed on the surface. A ceramic layer or a layer of a metal other than Ti is then formed as the uppermost layer on the underlayer by vapor deposition to obtain the objective Ti or Ti alloy material plated by vapor deposition with excellent adhesion.;COPYRIGHT: (C)1994,JPO
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