METHOD FOR MEASURING X-RAY SPECTRUM AND X-RAY EXPOSURE DEVICE

摘要

PURPOSE:To provide a method for measuring an X-ray spectrum, whereby an X-ray spectrum and its spatial distribution can readily be determined by the addition of a polarization component within an electron orbital plane to a polarization component perpendicular to the electron orbital plane, and an X-ray exposure device which can quickly and easily provide the X-ray spectrum data required to correct the amount of exposure. CONSTITUTION:The direction of propagation of an X-ray 2 which is synchrotron radiation is (z)-axis, an axis parallel to an electron orbital plane and perpendicular to (z)-axis is (x)-axis, and an axis perpendicular to both (x)- and (z)-axes is (y)-axis. An opening 8 is provided for regulating a scattering position for the X-ray enlarged by a mirror 3. An X-ray detector 7 is provided for measuring the spectrum of the scattered X-ray. The angles that the direction of the scattered X-ray detected by the X-ray detector 7 forms with (x)- and (y)-axes are equal.