QUANTITATIVE ANALYTIC/MEASURING METHOD EMPLOYING WAVELENGTH DISPERSIVE SPECTROMETER AND ENERGY DISPERSIVE SPECTROMETER

摘要

PURPOSE:To shorten the time required for measurement by excepting the characteristics X-rays, for which the peak is decided by means of an energy dispersive spectrometer(EDS) from the measurement by means of a wavelength dispersive spectrometer(WDS) thereby conducting the measurement efficiently. CONSTITUTION:Characteristic X-rays of each element are emitted from a sample 5 upon irradiation with an electron beam 2. A WDS comprises a spectral crystal 7 and a detector 8 whereas an EDS comprises a semiconductor detector 9, detection signal from the detectors 8, 9 are counted by a counter 10 and the count is stored in a memory circuit 12. When quantitative analysis is conducted, elements to be measured are previously stored on a measurement table and the measurements are started simultaneously by means of the WDS and EDS with the peak value being detected by the EDS. Since the EDS can measure all elements simultaneously, the characteristics X-rays recognized as a peak are not measured by the WDS which sequentially measures the characteristic X-rays not recognized as a peak.