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METHOD FOR FABRICATION OF WAVELENGTH SELECTIVE ELECTRO-OPTIC GRATING FOR DFB/DBR LASERS
METHOD FOR FABRICATION OF WAVELENGTH SELECTIVE ELECTRO-OPTIC GRATING FOR DFB/DBR LASERS
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机译:DFB / DBR激光波长选择电光栅的制造方法
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摘要
A method is described for the preparation of a DFB/DBR laser which includes an electro-optic grating formed by periodically modulating the index of refraction of the cladding employed. The method involves depositing a waveguide upon a semi-insulating or doped substrate and then depositing an active layer upon the resultant structure. The active layer is subsequently selectively etched and a cladding material deposited adjacent thereto and electrically isolated therefrom. The cladding is then selectively patterned with a conductive material by photolithographic techniques to yield a grating to periodically modulate the index of refraction.
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