首页>
外国专利>
Method for fabrication of wavelength selective electro-optic grating for DFB/DBR lasers
Method for fabrication of wavelength selective electro-optic grating for DFB/DBR lasers
展开▼
机译:用于DFB / DBR激光器的波长选择电光光栅的制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method is described for the preparation of a DFB/DBR laser which includes an electro-optic grating formed by periodically modulating the index of refraction of the cladding employed. The method involves depositing a waveguide upon a semi-insulating or doped substrate and then depositing an active layer upon the resultant structure. The active layer is subsequently selectively etched and a cladding material deposited adjacent thereto and electrically isolated therefrom. The cladding is then selectively patterned with a conductive material by photolithographic techniques to yield a grating to periodically modulate the index of refraction.
展开▼