首页> 外国专利> Polytetrafluoroethylene Porous Film and Method of Manufacturing the same (POLYTETRAFLUOROETHYLENE POROUS FILM AND METHOD FOR MANUFACTURING THE SAME)

Polytetrafluoroethylene Porous Film and Method of Manufacturing the same (POLYTETRAFLUOROETHYLENE POROUS FILM AND METHOD FOR MANUFACTURING THE SAME)

机译:聚四氟乙烯多孔膜及其制造方法(聚四氟乙烯多孔膜及其制造方法)

摘要

A polytetrafluoroethylene porous membrane is provided which is excellent as an air filter used as a cleaning chamber in the semiconductor industry and which is suitable for collection of fine particles in a gas such as air and exhibits a low pressure drop. The membrane has an average pore size of 0.2 to 0.4 [mu] m and has an air permeability of 20 to 50 mmH2O pressure drop appears. The membrane is prepared by stretching the untreated polytetrafluoroethylene at a specified temperature.
机译:提供了一种聚四氟乙烯多孔膜,其作为在半导体工业中用作清洁室的空气过滤器是优异的,并且适合于在诸如空气的气体中收集细颗粒并且表现出低压降。该膜的平均孔径为0.2至0.4μm,并且具有20至50mmH 2的空气渗透率。通过在规定的温度下拉伸未处理的聚四氟乙烯来制备膜。

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