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Spatial filter for a reducing pattern-projecting device (pattern projector)

机译:缩小图案投影设备(图案投影仪)的空间滤波器

摘要

A spatial filter which is used in a reducing pattern-projecting device has the following features: - a central region which has a reduced transmission of predetermined value and through which the light passes; - a border region which surrounds the central region and is essentially transparent; and - a measure for generating a phase difference of essentially 180 DEG between light beams which pass through the central region and the border region. IMAGE
机译:在缩小图案投影装置中使用的空间滤波器具有以下特征:-中央区域,其具有减小的预定值的透射率,并且光穿过该中央区域; -包围中心区域并且基本上是透明的边界区域; -一种用于在穿过中心区域和边界区域的光束之间产生基本上180°的相位差的措施。 <图像>

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