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Spatial filter for a reducing pattern-projecting device (pattern projector)
Spatial filter for a reducing pattern-projecting device (pattern projector)
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机译:缩小图案投影设备(图案投影仪)的空间滤波器
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摘要
A spatial filter which is used in a reducing pattern-projecting device has the following features: - a central region which has a reduced transmission of predetermined value and through which the light passes; - a border region which surrounds the central region and is essentially transparent; and - a measure for generating a phase difference of essentially 180 DEG between light beams which pass through the central region and the border region. IMAGE
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