ION BEAM EXIT WINDOW OF ION BEAM ANALYZER FOR MEASUREMENT UNDER ATMOSPHERIC PRESSURE

摘要

PURPOSE: To analyze chemical composition of a sample containing an element whose mass number is between those of a light element such as carbon and a heavy gold element by putting a metal film to a net consisting of one type of light element selected from beryllium, boron, and carbon. ;CONSTITUTION: A molybdenum net 11 uses, for example, a plane plate of a porous plate and forms a plate coated with synthetic diamond vapor as a carbon coating. A gold thin film 13 is manufactured by depositing aluminum on a glass plate which is subjected to mirror-surface polishing, depositing the gold thin film on the surface of water solution, dissolving the aluminum thin film with NaOH liquid, and scooping up the gold thin film floated on the surface of the water solution by a net 12. The manufactured ion beam window 1 is set to an ion beam analyzer for measurement under atmospheric pressure and at the same time a copper plate is arranged as a sample in a sample room filled with helium gas, helium ion beam is transmitted through the window 1, and then chemical composition is analyzed by the Rutherford backscattering spectrometry.;COPYRIGHT: (C)1996,JPO