BONDED MATERIAL, CORROSION-RESISTANT BONDING MATERIAL AND PRODUCTION OF BONDED MATERIAL

摘要

PURPOSE: To improve the wettability and the bonding strength of an aluminum nitride part and improve the corrosion resistance of a bonded material to a halogen-based corrosive gas in the production of a bonded material of an aluminum nitride part and a metallic part or a ceramic part by soldering. ;CONSTITUTION: This bonded material of an aluminum nitride part 8 and another part 7 made of ceramic or metal contains a bonding layer 23F formed between the parts 8 and 7. The bonding layer 23F contains a continuous phase 26 containing a metal selected from among popper, aluminum and nickel as at least the main component of the phase and further contains ≥10wt.% of one or more kinds of active metals selected from among magnesium, titanium, zirconium and hafnium.;COPYRIGHT: (C)1996,JPO