BONDED MATERIAL, CORROSION-RESISTANT BONDING MATERIAL AND PRODUCTION OF BONDED MATERIAL

摘要

When manufacturing the joined body between the aluminum nitride member and the metal member or the ceramic member by the soldering method, the flow property of the aluminum nitride member is improved to improve the joint strength, and the corrosion resistance of the joined body to the halogen-based corrosive gas is improved.;In the joined body of the aluminum nitride member 8 and the other member 7 made of ceramic or metal, a bonding layer 23F is formed between the member 8 and the member 7. The bonding layer 23F has at least one active metal selected from the group consisting of magnesium, titanium, zirconium or palladium, at least the main component of which has a continuous phase 26 consisting of a metal selected from the group consisting of copper, aluminum and nickel. It contains less than 10% by weight.