DEVICE FOR MEASURING ION BEAM CURRENT AND ION BEAM ENERGY AND DEVICE FOR MEASURING DISTRIBUTION OF THE CURRENT AND ENERGY

摘要

PURPOSE: To provide a device capable of accurately, easily and inexpensively measuring the ion beam current and ion beam energy and their distribution. ;CONSTITUTION: First, second and third electrodes are arranged in parallel before a collecting electrode G1 connected to a current measuring means and collecting an ion beam, and an ion passage hole is formed at the center of the first, second and third electrodes. The first electrode G4 closest to the electrode G1 is impressed with a positive voltage or grounded, the second electrode G5 is impressed with a positive or negative voltage, the third electrode G3 is used to prevent the first and second electrodes from being irradiated with an ion beam, and the collecting electrode G1, first electrode G4, second electrode G5 and third electrode G3 are insulated from one another in this device A for measuring the ion beam current and ion beam energy. Plural devices A are arranged in the same plane to obtain the device for measuring the distribution of the ion beam current and ion beam energy.;COPYRIGHT: (C)1996,JPO