FORMATION OF THIN FILM USING LASER ABRATION AND LASER ABRATION DEVICE

摘要

PURPOSE: To provide a thin film forming method using a laser abration, by which the thin film having uniform thickness and composition in the wide area can be formed. ;CONSTITUTION: The laser beam emitted from a laser beam oscillator 1 is reflected by galvano mirrors 3, 5 and further, introduced to a condensor lens 7 arranged on moving mechanism movable in two directions mutually crossing at right angle in the plane. Further, the laser beam irradiates a round disk target 12 arranged parallel with the moving range in the moving mechanism 9, 10 in a vacuum vessel 11. By this method, the thin film having uniform film thickness and small difference of the composition can be formed in large area on a substrate.;COPYRIGHT: (C)1996,JPO