APPARATUS FOR DETECTING PRESENCE/ABSENCE OF RECESSED PART BY ELECTRIC CHECKER, METHOD FOR DETECTING PRESENCE/ ABSENCE OF RECESSED PART BY THE DETECTING APPARATUS, JIG FOR THE DETECTING APPARATUS, MANUFACTURE FOR THE JIG, AND METHOD FOR USING APPARATUS FOR DETECTING PRESENCE/ABSENCE OF RECESSED PART BY ELECTRIC CHECKER

摘要

PURPOSE: To detect the presence/absence of a recessed part like a V cut in the surface of a substrate, by bringing a projecting part having a void part and a peripheral edge part of large adherence in the periphery close to the recessed part. ;CONSTITUTION: A projection 4 is formed at a part of a detecting device 2 of an electric checker. The periphery of the projection is dented to form a void part 3. A rough peripheral edge part 1 of large adherence is formed at a position lower than the front end of the projection 4 in the periphery of the projection 4. Both the peripheral edge part 1 and the projection 4 are brought close to the surface of a material to be detected. At this time, if there is a dented part in the surface of the material, the projection 4 enters a space part of the dent and the peripheral edge part 1 comes mechanically in close touch with the surface of the material thereby to be electrically connected with the material. Accordingly, the dented part in the surface can be detected simply by bringing the projection 4 in touch with the surface of the material. If the dented part is not present, the projection 4 comes in touch with the surface, whereby the absence of the dented part is electrically detected. In this manner, the presence/absence of a recessed part in the surface of a substrate, particularly, a V cut or the like can be detected.;COPYRIGHT: (C)1996,JPO